Selective growth and characterization of nanostructures with transmission electron microscopes

Applied Surface Science

Volumn 241, Issue 1-2 SPEC. ISS., 2005, Pages 56-60

  Shimojo, M ^a,b   Bysakh, S ^a   Mitsuishi, K ^a   Tanaka, M ^a   Song, M ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Aluminum trichloride; Catalysis; Electron beam induced reaction; Nano fabrication

Indexed keywords

ALUMINUM COMPOUNDS; CATALYSIS; CRYSTAL GROWTH; ELECTRON BEAMS; ELECTRON IRRADIATION; SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM TRICHLORIDE; ELECTRON BEAM-INDUCED REACTION; NANO-FABRICATION; PROBE SIZE;

NANOSTRUCTURED MATERIALS;

EID: 12244256138     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.016     Document Type: Conference Paper

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