Growth manner and mechanical characteristics of amorphous carbon nanopillar grown by electron-beam-induced chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 B, 2005, Pages 5646-5650

  Okada, Satoshi ^a,b   Mukawa, Takahito ^a,b   Kobayashi, Ryota ^a,b   Fujita, Jun Ichi ^a,b   Ishida, Masahiko ^a,c   Ichihashi, Toshinari ^a,c   Ochiai, Yukinori ^a,c   Kaito, Takashi ^a,d   Matsui, Shinji ^a,e  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c NEC CORPORATION   (Japan)

^d SII NANOTECHNOLOGY INC   (Japan)

^e UNIVERSITY OF HYOGO   (Japan)

Author keywords

Amorphous carbon nanopillar; Deflection measurement; EB CVD; Growth manner; Lateral growth; Young's modulus

Indexed keywords

AMORPHOUS MATERIALS; BISMUTH; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ELECTRON BEAMS;

AMORPHOUS CARBON; DEFLECTION MEASUREMENTS; GROWTH RATE;

CARBON;

EID: 31844444168     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.5646     Document Type: Article

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