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Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 784-787

Direct-write deposition with a focused electron beam

Author keywords

Chemical vapor deposition; Electron beam induced deposition; Silicon oxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CORRELATION THEORY; DIELECTRIC MATERIALS; ELECTRON BEAMS; NOZZLES; OXYGEN; SILICA;

EID: 33646026712     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.035     Document Type: Article
Times cited : (13)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.