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Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 784-787
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Direct-write deposition with a focused electron beam
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Author keywords
Chemical vapor deposition; Electron beam induced deposition; Silicon oxide
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CORRELATION THEORY;
DIELECTRIC MATERIALS;
ELECTRON BEAMS;
NOZZLES;
OXYGEN;
SILICA;
DEPOSITION RATE;
ELECTRON BEAM INDUCED DEPOSITION;
NANOSTRUCTURED DIELECTRICS;
SILICON OXIDE;
NANOSTRUCTURED MATERIALS;
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EID: 33646026712
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2006.01.035 Document Type: Article |
Times cited : (13)
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References (9)
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