Focused electron beam induced deposition of gold

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3168-3171

  Utke, I ^a   Hoffmann, P ^a   Dwir, B ^a   Leifer, K ^a   Kapon, E ^a   Doppelt, P ^b  

^a EPFL   (Switzerland)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; HYDROCARBONS; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS; PHOTONS;

ELECTRON BEAM DEPOSITION; FOCUSED ION BEAMS;

GOLD;

EID: 0034317713     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1319690     Document Type: Article

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