Electron-Beam-Induced Nanometer-Scale Deposition

Advances in Imaging and Electron Physics

Volumn 143, Issue , 2006, Pages 1-235

  Silvis Cividjian, Natalia ^a   Hagen, Cornelis W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM-INDUCED DEPOSITION (EBID); PRECURSOR MODULES; SECONDARY ELECTRONS; SOLID-STATE MICROFABRICATION;

DEPOSITION; DISSOCIATION; ETCHING; ION BOMBARDMENT; MONTE CARLO METHODS; PHOTORESISTS;

ELECTRON BEAMS;

EID: 33749474931     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1076-5670(06)43001-9     Document Type: Review

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