SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 5, 2004, Pages 2504-2510

Periodic structure formation by focused electron-beam-induced deposition

(4) Bret, T a,b Utke, I a,b Gaillard, C a,c Hoffmann, P a,b

a EPFL (Switzerland)

b IOA (Switzerland)

c CIME

Author keywords

[No Author keywords available]

Indexed keywords

ETCH MASKS; FIELD EMITTERS; NANOANTENNAE; PERIODIC STRUCTURE;

ADSORPTION; CHEMICAL VAPOR DEPOSITION; CHIP SCALE PACKAGES; COPPER; ELECTRON BEAMS; ELECTRON SCATTERING; INTEGRATED CIRCUITS; ION BEAM ASSISTED DEPOSITION; LITHOGRAPHY; MICROELECTRONICS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

ELECTRODEPOSITION;

EID: 9744258802 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1800356 Document Type: Article

Times cited : (36)

References (42)

1
- 0036589286
- J. Riekerby and J. H. G. Steinke, Chem. Rev. (Washington, D.C.) 102, 1525 (2002).
- (2002) Chem. Rev. (Washington, D.C.) , vol.102 , pp. 1525
- Riekerby, J.¹ Steinke, J.H.G.²

2
- 0024664340
- M. Rüb, H. W. P. Koops, and T. Tschudi, Microelectron. Eng. 9, 251 (1989).
- (1989) Microelectron. Eng. , vol.9 , pp. 251
- Rüb, M.¹ Koops, H.W.P.² Tschudi, T.³

3
- 4143100441
- L. R. Harriott, J. Vac. Sci. Technol. B 15, 2130 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2130
- Harriott, L.R.¹

4
- 0034317713
- I. Utke, P. Hoffmann, B. Dwir, K. Leifer, E. Kapon, and P. Doppelt, J. Vac. Sci. Technol. B 18, 3168 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3168
- Utke, I.¹ Hoffmann, P.² Dwir, B.³ Leifer, K.⁴ Kapon, E.⁵ Doppelt, P.⁶

5
- 0035450080
- H. W. P. Koops, O. E. Hoinkis, M. E. W. Honsberg, R. Schmidt, R. Blum, G. Bottger, A. Kuligk, C. Liguda, and M. Eich, Microelectron. Eng. 57-8, 995 (2001).
- (2001) Microelectron. Eng. , vol.57 , Issue.8 , pp. 995
- Koops, H.W.P.¹ Hoinkis, O.E.² Honsberg, M.E.W.³ Schmidt, R.⁴ Blum, R.⁵ Bottger, G.⁶ Kuligk, A.⁷ Liguda, C.⁸ Eich, M.⁹

6
- 0035519058
- K. Edinger, T. Gotszalk, and I. W. Rangelow, J. Vac. Sci. Technol. B 19, 2856 (2001).
- (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 2856
- Edinger, K.¹ Gotszalk, T.² Rangelow, I.W.³

7
- 0000920536
- A. Bezryadin and C. Dekker, J. Vac. Sci. Technol. B 15, 793 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 793
- Bezryadin, A.¹ Dekker, C.²

8
- 0030289164
- H. W. P. Koops, C. Schossler, A. Kaya, and M. Weber, J. Vac. Sci. Technol. B 14, 4105 (1996).
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4105
- Koops, H.W.P.¹ Schossler, C.² Kaya, A.³ Weber, M.⁴

9
- 0031674743
- M. Takai, T. Kishimoto, H. Morimoto, Y. K. Park, S. Lipp, C. Lehrer, L. Frey, H. Ryssel, A. Hosono, and S. Kawabuchi, Microelectron. Eng. 41-42, 453 (1998).
- (1998) Microelectron. Eng. , vol.41-42 , pp. 453
- Takai, M.¹ Kishimoto, T.² Morimoto, H.³ Park, Y.K.⁴ Lipp, S.⁵ Lehrer, C.⁶ Frey, L.⁷ Ryssel, H.⁸ Hosono, A.⁹ Kawabuchi, S.¹⁰

10
- 79956056203
- I. Utke, R. Berger, L. Scandella, and P. Hoffmann, Appl. Phys. Lett. 80, 4792 (2002).
- (2002) Appl. Phys. Lett. , vol.80 , pp. 4792
- Utke, I.¹ Berger, R.² Scandella, L.³ Hoffmann, P.⁴

11
- 84967850150
- Y. Akama, E. Nishimura, A. Sakai, and H. Murakami, J. Vac. Sci. Technol. A 8, 429 (1990).
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 429
- Akama, Y.¹ Nishimura, E.² Sakai, A.³ Murakami, H.⁴

12
- 0027632805
- K. I. Schiffmann, Nanotechnology 4, 163 (1993).
- (1993) Nanotechnology , vol.4 , pp. 163
- Schiffmann, K.I.¹

13
- 0001350740
- K. T. Kohlmann von Platen, L. M. Buchmann, H. C. Petzold, and W. H. Bruenger, J. Vac. Sci. Technol. B 10, 2690 (1992).
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 2690
- Von Platen, K.T.K.¹ Buchmann, L.M.² Petzold, H.C.³ Bruenger, W.H.⁴

14
- 0037101041
- O. Sqalli, I. Utke, P. Hoffmann, and F. Marquis-Weible, J. Appl. Phys. 92, 1078 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 1078
- Sqalli, O.¹ Utke, I.² Hoffmann, P.³ Marquis-Weible, F.⁴

15
- 0037164787
- H. G. Frey, F. Keilmann, A. Kriele, and R. Guckenberger, Appl. Phys. Lett. 81, 5030 (2002).
- (2002) Appl. Phys. Lett. , vol.81 , pp. 5030
- Frey, H.G.¹ Keilmann, F.² Kriele, A.³ Guckenberger, R.⁴

16
- 0031362727
- H. Hiroshima and M. Komuro, Jpn. J. Appl. Phys., Part l 36, 7686 (1997).
- (1997) Jpn. J. Appl. Phys., Part L , vol.36 , pp. 7686
- Hiroshima, H.¹ Komuro, M.²

17
- 0032091433
- H. Hiroshima and M. Komuro, Nanotechnology 9, 108 (1998).
- (1998) Nanotechnology , vol.9 , pp. 108
- Hiroshima, H.¹ Komuro, M.²

18
- 0023980956
- P. Kreuzer, Optik (Stuttgart) 78, 158 (1988).
- (1988) Optik (Stuttgart) , vol.78 , pp. 158
- Kreuzer, P.¹

19
- 9744231659
- Ph.D. thesis, University of London
- P. Charalambous, Ph.D. thesis, University of London, 1982.
- (1982)
- Charalambous, P.¹

20
- 0027272762
- N. A. Kislov, Scanning 15, 212 (1993).
- (1993) Scanning , vol.15 , pp. 212
- Kislov, N.A.¹

21
- 9044221287
- G. Möllenstedt, Optik (Stuttgart) 78, 132 (1988).
- (1988) Optik (Stuttgart) , vol.78 , pp. 132
- Möllenstedt, G.¹

22
- 9744277779
- P. B. Kargl, R. Kullmer, and D. Bauerle, Appl. Phys. A: Solids Surf. 57, 577 (1993).
- (1993) Appl. Phys. A: Solids Surf. , vol.57 , pp. 577
- Kargl, P.B.¹ Kullmer, R.² Bauerle, D.³

23
- 0009970832
- X. Xu and J. Melngailis, J. Vac. Sci. Technol. B 11. 2436 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2436
- Xu, X.¹ Melngailis, J.²

24
- 79956037527
- I. Utke, A. Luisier, P. Hoffmann, P. A. Buffat, and D. Laub. Appl. Phys. Lett. 81, 3245 (2002).
- (2002) Appl. Phys. Lett. , vol.81 , pp. 3245
- Utke, I.¹ Luisier, A.² Hoffmann, P.³ Buffat, P.A.⁴ Laub, D.⁵

25
- 4344702148
- A. Luisier, I. Utke, T. Bret, F. Cicoira, R. Hauert, S.-W. Rhee, P. Doppelt, and P. Hoffmann, J. Electrochem. Soc. 151, C535 (2004).
- (2004) J. Electrochem. Soc. , vol.151
- Luisier, A.¹ Utke, I.² Bret, T.³ Cicoira, F.⁴ Hauert, R.⁵ Rhee, S.-W.⁶ Doppelt, P.⁷ Hoffmann, P.⁸

26
- 0345376737
- T. Bret, I. Utke, A. Bachmann, and P. Hoffmann, Appl. Phys. Lett. 83. 4005 (2003).
- (2003) Appl. Phys. Lett. , vol.83 , pp. 4005
- Bret, T.¹ Utke, I.² Bachmann, A.³ Hoffmann, P.⁴

27
- 0942289427
- V. V. Aristov, N. A. Kislov, and I. I. Khodos, Microsc. Microanal. Microstruct. 3, 313 (1992).
- (1992) Microsc. Microanal. Microstruct. , vol.3 , pp. 313
- Aristov, V.V.¹ Kislov, N.A.² Khodos, I.I.³

28
- 0345698548
- K. T. Kohlmann von Platen, J. Chlebek, M. Weiss, K. Reimer, H. Oerlel, and W. H. Bruenger, J. Vac. Sci. Technol. B 11, 2219 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2219
- Von Platen, K.T.K.¹ Chlebek, J.² Weiss, M.³ Reimer, K.⁴ Oerlel, H.⁵ Bruenger, W.H.⁶

29
- 0028464955
- M. Weber, J. Phys. D 27, 1363 (1994).
- (1994) J. Phys. D , vol.27 , pp. 1363
- Weber, M.¹

30
- 18844452391
- V. E. Cosslett and R. N. Thomas, Br. J. Appl. Phys. 15, 883 (1964).
- (1964) Br. J. Appl. Phys. , vol.15 , pp. 883
- Cosslett, V.E.¹ Thomas, R.N.²

31
- 0040390769
- W. Bothe, Z. Phys. 54, 161 (1929).
- (1929) Z. Phys. , vol.54 , pp. 161
- Bothe, W.¹

32
- 0037807914
- E. J. Williams, Phys. Rev. 58, 292 (1940).
- (1940) Phys. Rev. , vol.58 , pp. 292
- Williams, E.J.¹

33
- 36149023656
- B. Rossi and K. Greisen, Rev. Mod. Phys. 13, 240 (1941).
- (1941) Rev. Mod. Phys. , vol.13 , pp. 240
- Rossi, B.¹ Greisen, K.²

34
- 0000127249
- V. E. Cosslett and D. C. Thomas, Br. J. Appl. Phys. 16, 779 (1965).
- (1965) Br. J. Appl. Phys. , vol.16 , pp. 779
- Cosslett, V.E.¹ Thomas, D.C.²

35
- 0017484767
- L. Reimer and H. Drescher, J. Phys. D 10, 805 (1977).
- (1977) J. Phys. D , vol.10 , pp. 805
- Reimer, L.¹ Drescher, H.²

36
- 0040204246
- F. Arnal, P. Verdier, and P.-D. Vincensini, C. R. Seances Acad. Sci., Ser. B 268, 1526 (1969).
- (1969) C. R. Seances Acad. Sci., Ser. B , vol.268 , pp. 1526
- Arnal, F.¹ Verdier, P.² Vincensini, P.-D.³

37
- 0000187121
- H. Drescher, L. Reimer, and H. Seidel, Z. Angew. Phys. 29, 331 (1970).
- (1970) Z. Angew. Phys. , vol.29 , pp. 331
- Drescher, H.¹ Reimer, L.² Seidel, H.³

38
- 9744271984
- F. Arnal, B. Marais, and P. Verdier, C. R. Seances Acad. Sci., Ser. B 278, 759 (1974).
- (1974) C. R. Seances Acad. Sci., Ser. B , vol.278 , pp. 759
- Arnal, F.¹ Marais, B.² Verdier, P.³

39
- 9744222136
- W. Oppel and H. Jahrreiss, Z. Phys. 252, 107 (1972).
- (1972) Z. Phys. , vol.252 , pp. 107
- Oppel, W.¹ Jahrreiss, H.²

40
- 0041072870
- H. W. P. Koops, J. Kretz, M. Rudolph, and M. Weber, J. Vac. Sci. Technol. B 11, 2386 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2386
- Koops, H.W.P.¹ Kretz, J.² Rudolph, M.³ Weber, M.⁴

41
- 9744259810
- K. Kanaya, K. Yonehara, E. Oho, N. Inoue, and M. Izumida, J. Electron. Mater. 39, 322 (1990).
- (1990) J. Electron. Mater. , vol.39 , pp. 322
- Kanaya, K.¹ Yonehara, K.² Oho, E.³ Inoue, N.⁴ Izumida, M.⁵

42
- 0003521686
- Springer, Berlin
- L. Reimer, in Scanning Electron Microscopy, 2nd ed. (Springer, Berlin, 1998).
- (1998) Scanning Electron Microscopy, 2nd Ed.
- Reimer, L.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.