Atomic force microscopy study of electron beam written contamination structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 54-62

  Amman, M ^a,b   Sleight, J W ^a   Lombardi, D R ^a   Welser, R E ^a   Deshpande, M R ^a   Reed, M A ^a   Guido, L J ^a  

^a YALE UNIVERSITY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243084677     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588429     Document Type: Article

References (21)

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14. In Ref. 1.
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16. The assumption of the hydrocarbon density being reduced by a constant amount over the exposed region is a simplification of the physical system. A more physically accurate reduction would be in the shape of a Gaussian or a double Gaussian (Refs. 17 and 18). However this additional complexity is not necessary to qualitatively model our data. A consequence of the simplification is that d is a quantity that is not easily extracted from the measured contamination cross sections.
17. T. H. P. Chang, J. Vac. Sci. Technol. 12, 1271 (1975).
18. R. J. Hawryluk, J. Vac. Sci. Technol. 19, 1 (1981).
19. Other differences arise as a result of the simplifications made in the model. For example, the model does not account for the reduction of mobile hydrocarbons in the region surrounding the exposed site after many exposures. This effect is more significant for the line geometry.
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21. J. R. Cannon, The One-Dimensional Heat Equation (Addison-Wesley, Reading, MA, 1984), pp. 32, 33.