Dynamic profile calculation of deposition resolution by high-energy electrons in electron-beam-induced deposition

Ultramicroscopy

Volumn 103, Issue 1, 2005, Pages 17-22

  Mitsuishi, K ^a   Liu, Z Q ^a   Shimojo, M ^a,b   Han, M ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Electron beam induced deposition; Monte Carlo modeling; Nano fabrication

Indexed keywords

COMPUTER SIMULATION; ELECTRON SCATTERING; MONTE CARLO METHODS;

ACCELERATING VOLTAGES; BULK SUBSTRATES; ELECTRON-BEAM-INDUCED DEPOSITION; MONTE CARLO PROFILE SIMULATORS;

ELECTRON BEAMS;

CHEMICAL STRUCTURE; CONFERENCE PAPER; ELECTRIC POTENTIAL; ELECTRON BEAM; ELECTRON TRANSPORT; ENERGY TRANSFER; MATHEMATICAL COMPUTING; MOLECULAR DYNAMICS; MONTE CARLO METHOD;

EID: 14944366469     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.11.011     Document Type: Conference Paper

References (16)

1. G.M. Shedd, H. Lezec, A.D. Dubner, and J. Melngailis Appl. Phys. Lett. 49 1986 1584
2. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama J. Vac. Sci. Technol. B 18 2000 3181
3. H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, and K.L. Lee Jpn. J. Appl. Phys. 33 1994 7099
4. H.W.P. Koops, R. Weiel, D.P. Kern, and T.H. Baum J. Vac. Sci. Tech. B 6 1988 477
5. P.C. Hoyle, J.R.A. Cleaver, and H. Ahmed J. Vac. Sci. Tech. B 14 1996 662
6. H. Hiroshima, N. Suzuki, N. Ogawa, and M. Komuro Jpn. J. Appl. Phys. 38 1999 7135
7. K.T. Kohlmann-von Platen, J. Chlebek, M. Weiss, K. Reimer, H. Oertel, and W.H. Brünger J. Vac. Sci. Tech. B 11 1993 2219
8. S. Matsui, and T. Ichihashi Appl. Phys. Lett. 53 5 1988 842
9. V.V. Aristov, A. Yu Kasumov, N.A. Kislov, O.V. Kononenko, V.N. Matveev, V.A. Tulin, I.I. Khodos, Yu A. Gorbatov, and V.I. Nikolaichik Nanotechnology 6 1995 35
10. N.A. Kislov, I.I. Khodos, E.D. Ivanov, and J. Barthel Scanning 18 1996 114
11. T.E. Allen, R.R. Kunz, and T.M. Mayer J. Vac. Sci. Tech. B 6 1988 2057
12. N. Silvis-Cividjian, C.W. Hagen, L.H.A. Leunissen, and P. Kruit Microelectron. Eng. 61-62 2002 693
13. N. Silvis-Cividjian, C.W. Hagen, P. Kruit, M.A.J.v.d. Stam, and H.B. Groen Appl. Phys. Lett. 82 2003 3514
14. K. Mitsuishi, M. Shimojo, M. Han, and K. Furuya Appl. Phys. Lett. 83 2003 2064
15. D.C. Joy, Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford University Press, New York, 1995, p. 25.
16. H.F. Winters, and M. Inokuti Phys. Rev. A 25 1982 1420