Fabrication of nanofigures by focused electron beam-induced deposition

Thin Solid Films

Volumn 464-465, Issue , 2004, Pages 331-334

  Ueda, Kazuyuki ^a   Yoshimura, Masamichi ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

EBID; Electron beam; Lithography; Nanostructure; Nanowire; SEM; Surface

Indexed keywords

ADSORPTION; BACKSCATTERING; CONTAMINATION; DEPOSITION; DIFFUSION; DISSOCIATION; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; GROWTH KINETICS; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM-INDUCED DEPOSITION (EBID); GROWTH RATES; NANOSTRUCTURES; NANOWIRES;

NANOSTRUCTURED MATERIALS;

EID: 4544334222     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.06.078     Document Type: Article

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