In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 963-969

  Bauerdick, S ^a   Burkhardt, C ^a   Rudorf, R ^a   Barth, W ^c   Bucher, V ^b   Nisch, W ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b Kleindiek Nanotechnik GmbH   (Germany)

^c Nascatec GmbH   (Germany)

Author keywords

Atomic force microscope; Electron beam induced deposition; In situ monitoring; Local gas injection; Micro manipulator

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY;

LOCAL GAS INJECTION;

MICROELECTRONICS;

EID: 0038358207     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00160-6     Document Type: Conference Paper

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