Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 B, 2005, Pages 5651-5653

  Shimojo, Masayuki ^a,b   Zhang, Wei ^a   Takeguchi, Masaki ^a   Tanaka, Miyoko ^a   Mitsuishi, Kazutaka ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b SAITAMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Electron beam induced deposition; Iron carbide; Iron pentacarbonyl; Nanofabrication; Scan speed

Indexed keywords

ELECTRON BEAMS; IRRADIATION; NANOTECHNOLOGY; POSITION CONTROL; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON-BEAM-INDUCED DEPOSITION; IRON CARBIDE; IRON PENTACARBONYL; SCAN SPEED;

NANOSTRUCTURED MATERIALS;

EID: 31844453620     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.5651     Document Type: Article

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