Formation and thermal stability of sub-10-nm carbon templates on Si(100)

Applied Physics Letters

Volumn 85, Issue 12, 2004, Pages 2352-2354

  Guise, Olivier ^a   Ahner, Joachim ^a,b   Yates, John ^a   Levy, Jeremy ^a  

^a UNIVERSITY OF PITTSBURGH   (United States)

^b SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT HYDROCARBONS; CARBON TEMPLATES; COMPLEX OXIDES; ORGANIC CONTAMINATION;

CARBON; HYDROCARBONS; LITHOGRAPHY; MOLECULAR BEAM EPITAXY; OXIDATION; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR MATERIALS; THERMODYNAMIC STABILITY; ULTRAHIGH VACUUM;

SILICON;

EID: 7044254790     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1794369     Document Type: Article

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