SCOPUS 정보 검색 플랫폼

CVD Diamond for Electronic Devices and Sensors

Volumn , Issue , 2009, Pages 467-544

CVD Diamond MEMS

Author keywords

Integration monolithic and hybrid integration; Laser flash technique (LFT); MEMS and micro systems technology (MST); MEMS applications and heaters; MEMS components and sensing and actuation principles; Microelectromechanical systems (MEMS); Microwave plasma assisted CVD (MPCVD) and hot filament CVD (HFCVD); Technological building blocks; Transducer elements

Indexed keywords

EID: 84948758266 PISSN: None EISSN: None Source Type: Book
DOI: 10.1002/9780470740392.ch18 Document Type: Chapter

Times cited : (5)

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209
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210
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211
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212
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213
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216
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217
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219
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220
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.