Review on diamond based piezoresistive sensors

IEEE International Symposium on Industrial Electronics

Volumn 1, Issue , 1998, Pages 147-152

  Werner, Matthias ^a   Adamschik, Mario ^a   Gluche, Peter ^a   Kohn, Erhard ^a   Fecht, Hans Joerg ^a  

^a Informationstechnik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BRIDGE CIRCUITS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; PRESSURE TRANSDUCERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; THIN FILMS;

DIAMOND SENSORS; PIEZORESISTORS;

PIEZOELECTRIC TRANSDUCERS;

EID: 0031630346     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)