Thin film diamond sensor technology

Physica Status Solidi (A) Applied Research

Volumn 154, Issue 1, 1996, Pages 455-466

  Chalker, P R ^a   Johnston, C ^a  

^a RICARDO UK LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; PASSIVATION; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SENSORS; SINGLE CRYSTALS; THIN FILMS;

ELECTRICAL CONTACT METALLIZATION; SINGLE CRYSTAL DIAMOND; THIN FILM DIAMOND SENSOR;

DIAMOND FILMS;

EID: 0030107277     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211540132     Document Type: Article

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