Diamond MEMS - A new emerging technology

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 934-940

  Kohn, E ^a   Gluche, P ^a   Adamschik, M ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Diamond processing; Diamond on Si; Micro electromechanical systems; Sensors

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; SENSORS;

DIAMOND-ON-SILICON TECHNOLOGY;

DIAMOND FILMS;

EID: 0032622261     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00294-5     Document Type: Article

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