An "all-diamond" inkjet realized in sacrificial layer technology

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 504-508

  Muller R ^a   Gronmaier, R ^a   Janischowsky, K ^a   Kusterer, J ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Actuators; Diamond film; Micro electromechanical systems (MEMS); Micro fluidics

Indexed keywords

ACTUATORS; CURRENT DENSITY; DOPING (ADDITIVES); ELECTRIC HEATING ELEMENTS; ELECTROPLATING; FILM GROWTH; GLUING; MICROELECTROMECHANICAL DEVICES; NUCLEATION; REACTIVE ION ETCHING; THERMAL CONDUCTIVITY;

BIAS ENHANCED NUCLEATION; DIAMOND HEATING ELEMENTS; MICRO FLUIDICS; PHOTOSENSITIVE POLYMERS;

DIAMOND FILMS;

EID: 18444403454     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.01.005     Document Type: Conference Paper

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