Evaluation of diamond gauge factor up to 500 °C

Diamond and Related Materials

Volumn 16, Issue 8, 2007, Pages 1670-1675

  Yamamoto, Akira ^a   Norio, Nawachi ^a   Takahiro, Tsutsumoto ^a  

^a Seibu Industrial Research Institute of Hiroshima Prefecture   (Japan)

Author keywords

Hot filament CVD; p type doping; Sensors; Strain

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SENSORS; SILICON; STRAIN; SUBSTRATES;

GAUGE FACTOR; HOT FILAMENT CVD; P-TYPE DOPING;

DIAMOND FILMS;

EID: 34249084941     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.02.010     Document Type: Article

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