Laser diagnostics of mechanical and elastic properties of silicon and carbon films

Applied Surface Science

Volumn 106, Issue , 1996, Pages 429-437

  Hess, P ^a  

^a UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; AMORPHOUS FILMS; CARBON; CONTINUOUS WAVE LASERS; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; LASER ABLATION; LASER DIAGNOSTICS; PULSED LASER APPLICATIONS; SILICON; SURFACE WAVES;

BROAD BAND SURFACE ACOUSTIC WAVE PULSE; MICHELSON INTERFEROMETER; POISSON'S RATIO;

THIN FILMS;

EID: 0030565779     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00369-8     Document Type: Article

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