Mechanical microactuators based on nanocrystalline diamond films

New Diamond and Frontier Carbon Technology

Volumn 16, Issue 6, 2006, Pages 295-321

  Kusterer, Joachim ^a   Schmid, Philipp ^a   Kohn, Erhard ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Actuators; Integration technologies; Intrinsic stress; MEMS; Nanocrystalline diamond

Indexed keywords

COMPUTER SIMULATION; DIAMOND FILMS; ELECTRIC SWITCHES; MEMS; MICROSTRUCTURE; NANOCRYSTALLINE MATERIALS;

INTEGRATION TECHNOLOGIES; INTRINSIC STRESSES; NANOCRYSTALLINE DIAMOND;

MICROACTUATORS;

EID: 34249002273     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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