Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 750-754

  Ferreira, N G ^a   Abramof, E ^a   Corat, E J ^a   Leite, N F ^a   Trava Airoldi, V J ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

Boron doping; Diamond; Stress; X ray diffraction

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; X RAY DIFFRACTION;

COLUMNAR GROWTH; MICRO RAMAN SPECTROSCOPY;

DIAMOND FILMS;

DIAMOND;

EID: 0035270417     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00522-7     Document Type: Article

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