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Volumn 88, Issue 22, 2006, Pages
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5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC WAVE PROPAGATION;
ALUMINUM NITRIDE;
DISPERSION (WAVES);
ELECTRON BEAM LITHOGRAPHY;
LAYERED MANUFACTURING;
NUCLEATION;
TRANSDUCERS;
DIAMOND LAYERED STRUCTURE;
FUNDAMENTAL FREQUENCY;
INTERDIGITAL TRANSDUCERS;
RAYLEIGH WAVE;
ACOUSTIC SURFACE WAVE DEVICES;
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EID: 33744806057
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2208372 Document Type: Article |
Times cited : (101)
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References (9)
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