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Volumn 88, Issue 22, 2006, Pages

5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ALUMINUM NITRIDE; DISPERSION (WAVES); ELECTRON BEAM LITHOGRAPHY; LAYERED MANUFACTURING; NUCLEATION; TRANSDUCERS;

EID: 33744806057     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2208372     Document Type: Article
Times cited : (101)

References (9)
  • 2
    • 0037582120 scopus 로고    scopus 로고
    • Springer Series in Materials Processing, edited by B.Dischler and C.Wild (Springer, Berlin
    • S. I. Shikata, Low-Pressure Synthetic Diamond, Springer Series in Materials Processing, edited by, B. Dischler, and, C. Wild, (Springer, Berlin, 1998), p. 261.
    • (1998) Low-Pressure Synthetic Diamond , pp. 261
    • Shikata, S.I.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.