Concept for diamond 3-D integrated UV sensor

Diamond and Related Materials

Volumn 15, Issue 11-12 SPEC. ISS., 2006, Pages 1967-1971

  Kaiser, A ^a   Kueck, D ^a   Benkart, P ^a   Munding, A ^a   Prinz, G M ^a   Heittmann, A ^b   Huebner, H ^b   Sauer, R ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

3D Integration; Nanocrystalline diamond; Sensor arrays; UV sensor

Indexed keywords

CAMERAS; CMOS INTEGRATED CIRCUITS; DIAMONDS; ETCHING; INTERMETALLICS; METALLIZING; NANOSTRUCTURED MATERIALS;

3D INTEGRATION; INTERMETALLIC DIFFUSION; NANOCRYSTALLINE DIAMOND; SENSOR ARRAYS;

ULTRAVIOLET DETECTORS;

EID: 33751173427     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.07.012     Document Type: Article

References (4)

1. Pace E., and De Sio A. Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment 514 (2003) 93
2. Benkart P., Kaiser A., Munding A., Kohn E., Heittmann A., Hübner H., and Ramacher U. IEEE Journal of Design and Test of Computers 22 6 (November-December 2005) 512
3. Huebner H., Ehrmann O., Eigner M., Gruber W., Klumpp A., Merkel R., Ramm P., Roth M., Weber J., and Wieland R. Materials Science Society (2002) 53
4. Janischowsky K., Ebert W., and Kohn E. Diamond and Related Materials 12 (2003) 336