Design of high-speed diamond microswitch

Semiconductor Science and Technology

Volumn 18, Issue 3, 2003, Pages

  Schmid, P ^a   Adamschik, M ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DAMPING; DIAMOND FILMS; FRACTURE TOUGHNESS; PARAMETER ESTIMATION; POLYCRYSTALLINE MATERIALS; THERMAL CONDUCTIVITY OF SOLIDS;

MICROSWITCHES;

SEMICONDUCTOR SWITCHES;

EID: 0037341785     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/18/3/310     Document Type: Article

References (12)

1. Wur D R, Davidson J L, Kang W P and Kinser D L 1995 Polycrystalline diamond pressure sensor J. Microelectromech. Syst. 4 34-41
2. Yang G S, Aslam D M, White M and McGrath J J 1997 Diam. Relat. Mater. 6 394
3. Rao T N and Fujishima A 2000 Recent advances in electrochemistry of diamond Diam. Relat. Mater. 9 384
4. Shibata T, Kitamoto Y, Unno K and Makino E 2000 Micromachining of diamond films for MEMS applications J. Micromech. Syst. 9 47
5. Kohn E, Gluche P and Adamschik M 1999 Diamond MEMS-a new emerging technology Diam. Relat. Mater. 8 934
6. Petersen K E 1979 Micromechanical membrane switches on silicon IBM J. Res. Dev. 23 376-85
7. Adamschik M, Ertl S, Schmid P, Gluche P, Flöter A and Kohn E 1999 Electrostatic diamond micro switch Digest of Technical Papers, Transducers 99 (Sendai, Japan, June 1999) pp 1284-7
8. Ertl S, Adamschik M, Schmid P, Gluche P, Flöter A and Kohn E 2000 Surface micromachined diamond microswitch Diam. Relat. Mater. 9 970-4
9. Adamschik M, Schmid P, Ertl S, Ebert W, Käb N and Kohn E 2000 CVD-diamond for high temperature MEMS applications-first example: diamond microswitch 5th Int. High Temperature Conference (HiTEC) (Albuquerque, USA, 2000)
10. Hearn E J 1985 Mechanics of Materials (Oxford: Pergamon)
11. Gross W A 1962 Gas Film Lubrication (New York: Wiley)
12. Kohn E, Adamschik M, Schmid P, Ertl S and Flöter A 2001 Diamond electro-mechanical micro devices-technology and performance ICNST-7 (2000) Diam. Relat. Mater. 10 1684-91