Micromachining of diamond film of MEMS applications

Journal of Microelectromechanical Systems

Volumn 9, Issue 1, 2000, Pages 47-51

  Shibata, Takayuki ^a   Kitamoto, Yasutaka ^a   Unno, Kazuya ^a   Makino, Eiji ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ETCHING; GLASS BONDING; MICROMACHINING; MICROSTRUCTURE; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; SUBSTRATES; THIN FILMS;

DIAMOND CANTILEVER; DIAMOND MICROGRIPPER; DIAMOND THIN FILM; MICROFABRICATION TECHNIQUE; SACRIFICIAL LAYER ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033892148     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.825776     Document Type: Article

References (21)

1. S. Suzuki, T. Matsuura, M. Uchizawa, S. Yura, and H. Shibata, "Friction and wear studies on lubricants and materials applicable to MEMS," in Proc. IEEE MEMS Workshop, Nara, Japan, Jan. 30-Feb. 2 1991, pp. 143-147.
2. E. Obermeier, "High temperature microsensores based on polycrystalline diamond thin films," in Proc. 8th Int. Conf. Solid-State Sens. Actuators, Stockholm, Sweden, June 25-29, 1995, pp. 178-181.
3. N. Fujimori and H. Nakahata, "Thermistor made of CVD diamond films," New Diamonds, pp. 98-101, 1990.
4. M. Aslam, G. S. Yang, and A. Masood, "Boron-doped vapor-deposited diamond temperature microsensors," Sens. Actuators, vol. A45, pp. 131-137, 1994.
5. D. R. Wur, J. L. Davidson, W. P. Kang, and D. L. Kinser, "Polycrystalline diamond pressure sensor," J. Microelectromech. Syst., vol. 4, pp. 34-41, Mar. 1995.
6. T. Roppel, M. Baginski, D. Jaworske, and R. Ramesham, "Sensor applications for synthetic polycrystalline thin-film diamond," Sens. Mater., vol. 2, no. 6, pp. 329-346, 1991.
7. W. P. Kang, Y. Gurbuz, J. L. Davidson, and D. V. Kerns, "A polycrystalline diamond thin-film-based hydrogen sensor," Sens. Actuators, vol. B24-25, pp. 421-425, 1995.
8. Y. Gurbuz, W. P. Kang, J. L. Davidson, and D. V. Kerns, "A novel oxygen gas sensor utilizing thin film diamond diode with catalyzed tin oxide electrode," Sens. Actuators, vol. B35-36, pp. 303-307, 1995.
9. K. Hirabayashi, Y. Taniguchi, O. Takamatsu, T. Ikeda, K. Ikoma, and N. Iwasaki-Kurihara, "Selective deposition of diamond crystals by chemical vapor deposition using a tungsten-filament method," Appl. Phvs. Lett., vol. 53, no. 19, pp. 1815-1817, 1988.
10. J. L. Davidson, R. Ramesham, and C. Ellis, "Synthetic diamond micromechanical membranes, cantilever beams, and bridges," J. Electrochem. Soc., vol. 137, no. 10, pp. 3206-3210, 1990.
11. T. Inoue, H. Tachibana, K. Kumagai, K. Miyata, K. Nishimura, K. Kobashi, and A. Nakaue, "Selected-area deposition of diamond films," J. Appl. Phys., vol. 67, no. 12, pp. 7329-7336, 1990.
12. A. Masood, M. Aslam, M. A. Tamor, and T. J. Potter, "Techniques for patterning of CVD diamond films on nondiamond substrates," J. Electrochem. Soc., vol. 138, no. 11, pp. L67-L68, 1991.
13. M. Mao, C. Kang, X. Zhang, S. Tan, W. Wang, Z. Zhuang, and X. Jing, "Selective growth of polycrystalline diamond thin films using bias-enhanced MPCVD," Sens. Mater., vol. 6, no. 5, pp. 311-318, 1994.
14. O. Dorsch, M. Werner, E. Obermeier, R. E. Harper, C. Johnston, and I. M. Buckley-Golder, "Etching of polycrystalline diamond and amorphous carbon films by RIE," Diamond Related Mater., vol. 1, pp. 277-280, 1992.
15. J. D. Hunn and C. P. Christensen, "Ion beam and laser-assisted micro-machining of single-crystal diamond," Solid State Technol., vol. 37, no. 12, pp. 57-60, 1994.
16. M. Aslam and D. Schulz, "Technology of diamond microelectromechanical systems," in Proc. 8th Int. Conf. Solid-State Sens. Actuators, Stockholm, Sweden, June 25-29, 1995, pp. 222-224.
17. M. Y. Mao, T. P. Wang, J. F. Xie, and W. Y. Wang, "The fine patterning of diamond thin film," in Proc. IEEE MEMS Workshop, Amsterdam, The Netherlands, Jan. 29-Feb. 2 1995, pp. 392-393.
18. H. Björkman, P. Rangsten, U. Simu, J. Karlsson, P. Hollman, and K. Hjort, "Diamond microstructure replicas from silicon masters," in Proc. IEEE MEMS Syst., Hidelberg, Germany, Jan. 25-29, 1998, pp. 34-39.
19. K. Okano, K. Hoshina, and M. Iida, "Fabrication of a diamond field emitter array," Appl. Phys. Lett., vol. 64, no. 20, pp. 2742-2744, 1994.
20. K. Unno, Y. Kitamoto, T. Shibata, E. Makino, and M. Ikeda, "Smart nano-machining and measurement system with semiconductive diamond probe," in Proc. 4th European Conf. Smart Structures and Mater./2nd Int. Conf. Micromech., Intelligent Mater., Robot., Harrogate, UK, July 6-8, 1998, pp. 599-605.
21. M. Yamamoto, T. Shibata, and K. Saitoh, "Effects of surface treatment of silicon substrate on nucleation density of diamond synthesized in gas phase," J. Jpn. Soc. Precis. Eng., vol. 56, no. 5, pp. 923-928, 1990. in Japanese.