Effect of nitrogen and oxygen addition on morphology and texture of diamond films (from polycrystalline to nanocrystalline)

Diamond and Related Materials

Volumn 17, Issue 1, 2008, Pages 72-78

  Tang, C J ^a,b   Neves, A J ^a   Pereira, S ^c   Fernandes, A J S ^a   Gracio J ^a,b   Carmo, M C ^a  

^a UNIVERSITY OF AVEIRO   (Portugal)

^b UNIVERSITY OF AVEIRO   (Portugal)

^c UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

Microwave plasma chemical vapor deposition; Morphology; Nanocrystalline diamond; Oxygen and nitrogen addition; Polycrystalline diamond; Texture

Indexed keywords

ADDITION REACTIONS; GROWTH RATE; MICROSTRUCTURE; NANOCRYSTALLINE MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE MORPHOLOGY;

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD); NANOCRYSTALLINE DIAMONDS; NITROGEN ADDITION; POLYCRYSTALLINE DIAMOND;

DIAMOND FILMS;

EID: 36749026513     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.022     Document Type: Article

References (32)

1. Xiao X., Elam J.W., Trasobares S., Auciello O., and Carlisle J.A. Adv. Mater. 17 (2005) 1496
2. Srikanth V.S.S., Tan M.H., and Jiang X. Appl. Phys. Lett. 88 (2006) 073109
3. Griffin J., and Ray P.C. Nanotechnology 17 (2006) 1225
4. Birrell J., Gerbi J.E., Auciello O., and Carlisle J.A. J. Phys., Condens. Matter 18 (2006) S1771
5. Koeck F.A.M., and Nemanich R.J. Diamond Relat. Mater. 15 (2006) 2006
6. Gruen D.M., Liu S., Krauss A.R., Luo J., and Pan X. Appl. Phys. Lett. 64 (1994) 1502
7. Locher R., Wild C., Herres N., Behr D., and Koidl P. Appl. Phys. Lett. 65 (1994) 34
8. Cao G.Z., Schermer J.J., Van Enckevort W.J.P., Elst W.A.L.M., and Giling L.J. J. Appl. Phys. 79 (1996) 1357
9. Müller-Sebert W., Wörner E., Fuchs F., Wild C., and Koidl P. Appl. Phys. Lett. 68 (1996) 759
10. Bohr S., Haubner R., and Lux B. Appl. Phys. Lett. 68 (1996) 1075
11. Asmussen J., Mossbrucker J., Khatami S., Huang W.S., Wright B., and Ayres V. Diamond Relat. Mater. 8 (1999) 220
12. J. Achard, F. Silva, O. Brinza, A. Tallaire, A. Gicquel, Diamond Relat. Mater. (in press).
13. Ruan J., Kobashi K., and Choyke W.J. Appl. Phys. Lett. 60 (1992) 1884
14. Tang C.J., Neves A.J., and Fernandes A.J.S. Diamond Relat. Mater. 13 (2004) 203
15. Chein T.H., Wei J., and Tzeng Y. Diamond Relat. Mater. 8 (1999) 1686
16. Yu Z., Karlsson U., and Flodström A. Thin Solid Films 342 (1999) 74
17. Seo S.-H., Lee T.-H., Kim Y.-D., Park C.-K., and Park J.-S. Thin Solid Films 447-448 (2004) 212
18. Neto M.A., and Pereira E. Diamond Relat. Mater. 15 (2006) 465
19. Ando Y., Tachibana T., and Kobashi K. Diamond Relat. Mater. 10 (2001) 312
20. Wild C., Herres N., and Koidl P. J. Appl. Phys. 68 (1990) 973
21. Tang C.J., Neves A.J., and Carmo M.C. J. Phys., Condens. Matter 17 (2005) 1687
22. Tang C.J., Neves A.J., and Fernandes A.J.S. Diamond Relat. Mater. 12 (2003) 1488
23. Silva F., Bénédic F., Bruno P., and Gicquel A. Diamond Relat. Mater. 14 (2005) 398
24. Bühler J., and Prior Y. J. Cryst. Growth 209 (2000) 779
25. Wild C., Kohl R., Herres N., Müller-Sebert W., and Koidl P. Diamond Relat. Mater. 3 (1994) 373
26. Baik Y.J., and Eun K.Y. Thin Solid Films 212 (1992) 156
27. Baik Y.J., and Eun K.Y. Thin Solid Films 214 (1992) 123
28. Clausing R.E., Heatherly L., Horton L.L., Specht E.D., Begun G.M., and Wang Z.L. Diamond Relat. Mater. 1 (1992) 411
29. Choi I.-H., Weisbecker P., Barrat S., and Bauer-Grosse E. Diamond Relat. Mater. 13 (2004) 574
30. Subramanian K., Kang W.P., Davidson J.L., and Hofmeister W.H. Diamond Relat. Mater. 14 (2005) 404
31. Tang C.J., Neves A.J., and Carmo M.C. Appl. Phys. Lett. 86 (2005) 223107
32. Barnard A.S., and Sternberg M. Nanotechnology 18 (2007) 025702