Actuator - Sensor technology on "electronic grade" diamond films

Microsystem Technologies

Volumn 5, Issue 1, 1998, Pages 38-43

  Gluche, P ^a   Leuner, R ^a   Vescan, A ^a   Ebert, W ^a   Kohn, E ^a   Rembe, C ^a   Aus Der Wiesche, S ^a   Hofer, E P ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342360702     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050138     Document Type: Article

References (10)

1. Wolter SD; Borst TH; Vescan A; Kohn E (1996) The nucleation of highly oriented diamond on silicon via an alternating current substrate bias. Appl. Phys. Lett. 68(25): 3558
2. Gluche P; Vescan A; Ebert W; Kohn E (1996) Processing of high temperature stable contacts to single crystal diamond. 3rd Int. High Temperature Electronics Conf. Albuquerque, NM, USA, 9-14 June, Transactions: 189-194.
3. Borst TH; Weis O (1995) Electrical characterization of homoepitaxial diamond films doped with B, P, Li and Na during growth. Diamond and Rel. Mat. 4, 948-952
4. Beurer G; Hofer EP; Patzer J (1994) Process control for improvement of print quality and life time of bubble-jet printers. Proc. IS&T/SPIE Symp. on Electronic Imaging: Science and Technology; SPIE Vol. 2171, San Jose, USA, 6-10 February
5. Hofer EP; Rembe C; Beuten M (1997) High speed cinematography of dynamical processes in micro devices. Proc. 7th Int. Conf. on Dynamic Problems in Mechanics, Angra dos Reis, Brazil, 3-7 March
6. De Groot SR; Mazur P (1962) Nonequilibrium thermodynamics (North-Holland Publishing Company, Amsterdam)
7. Spalding DB (1991) The PHOENICS beginner's guide (CHAM, London)
8. Landau LD; Lifshitz EM (1982) Statistical physics (Pergamon Press, Oxford)
9. Rembe C; Patzer J; Krehl P; Hofer EP (1996) Realcinematographic visualization of droplet ejection in thermal ink jets, J. IS&T 40(5): 400-404
10. Van Straten S; Cole R (1979) Boiling phenomena, Vol I (Washington)