Simulation of a diamond-based bistable thermal microswitch

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 380-383

  Schmid, P ^a   Hernandez Guillen, F J ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Bistable; Diamond; Simulation; Switch; Thermal

Indexed keywords

ACTUATORS; BUCKLING; COMPUTER SIMULATION; DIAMONDS; ELECTRIC SWITCHES; FINITE ELEMENT METHOD; POLYCRYSTALLINE MATERIALS;

MICROSYSTEMS; THERMAL ACTUATION; THERMAL MICROSWITCHES;

MICROELECTRONICS;

EID: 6344277018     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. M. Adamschik, S. Ertl, P. Schmid, P. Gluche, A. Flöter, E. Kohn, "Electrostatic Diamond Micro Switch", Digest of technical papers, Transducers 99, Sendai, Japan, pp. 1284-1287, 1999
2. P. Gluche, R. Leuner, E. Kohn, C. Rembe, S. Aus der Wiesche, E. P. Hofer, "Novel Thermal Microactuator Based on CVD-Diamond Films", Technical Digest, International Electron Devices Meeting (IEDM), San Francisco, USA, pp. 483-486, 1998