Characterization of three-dimensional microstructures in single-crystal diamond

Diamond and Related Materials

Volumn 15, Issue 10, 2006, Pages 1614-1621

  Olivero, P ^a   Rubanov, S ^a   Reichart, P ^a   Gibson, B C ^a   Huntington, S T ^a   Rabeau, J R ^a   Greentree, Andrew D ^a   Salzman, J ^b   Moore, D ^c   Jamieson, D N ^a   Prawer, S ^a  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Diamond crystal; Micro electromechanical systems (MEMS); Micro optics; Optical properties characterization

Indexed keywords

DIAMONDS; ETCHING; ION BEAMS; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; PHOTOLUMINESCENCE; SINGLE CRYSTALS;

DIAMOND CRYSTAL; FOCUSED ION BEAM (FIB) ASSISTED LIFT-OFF TECHNIQUE; OPTICAL PROPERTIES CHARACTERIZATION;

MICROSTRUCTURE;

EID: 33748801532     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.01.018     Document Type: Article

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