Diamond and diamond-like carbon MEMS

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages

  Luo, J K ^a,d   Fu, Y Q ^a   Le, H R ^b   Williams, J A ^a   Spearing, S M ^c   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF DUNDEE   (United Kingdom)

^c UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^d UNIVERSITY OF BOLTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ELASTIC MODULI; MEMS; SILICON COMPOUNDS; THERMAL CONDUCTIVITY; THERMAL EXPANSION; WEAR RESISTANCE;

DLC FILMS; DLC MATERIALS; ENGINEERING DESIGN; MATERIAL PROPERTIES;

THIN FILMS;

EID: 34547571032     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/S12     Document Type: Article

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