Diamond replicas from microstructured silicon masters

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 24-29

  Bjorkman H ^a   Rangsten, P ^a   Hollman, P ^a   Hjort, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHEMISTRY; CHEMICAL VAPOR DEPOSITION; COOLING SYSTEMS; METALLOGRAPHIC MICROSTRUCTURE; PLASTIC MOLDS; SILICON; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THERMOPLASTICS; THICK FILMS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (CVD); MICROSTRUCTURED CARRIERS;

DIAMOND FILMS;

EID: 0343972357     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00250-7     Document Type: Article

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