Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond

Advanced Materials

Volumn 17, Issue 20, 2005, Pages 2427-2430

  Olivero, Paolo ^a   Rubanov, Sergey ^a   Reichart, Patrick ^a   Gibson, Brant C ^a   Huntington, Shane T ^a   Rabeau, James ^a   Greentree, Andrew D ^a   Salzman, Joseph ^b   Moore, David ^c   Jamieson, David N ^a   Prawer, Steven ^a  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DIAMONDS; ETCHING; INTEGRATION; ION BEAMS; ION IMPLANTATION; MICROSTRUCTURE; PHASE TRANSITIONS; RESONATORS; SINGLE CRYSTALS;

AMORPHOUS CARBON; ION IRRADIATION; LIFT-OFF TECHNIQUES; THREE-DIMENSIONAL MICROMACHINING;

MICROMACHINING;

EID: 27144501867     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200500752     Document Type: Article

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