Piezo-actuated nanodiamond cantilever technology for high-speed applications

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1429-1433

  Kusterer, J ^a   Luker A ^b   Herfurth, P ^a   Men, Y ^a   Ebert, W ^a   Kirby, P ^b   O'Keefe, M ^c   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

^b CRANFIELD UNIVERSITY   (United Kingdom)

^c Filtronic Compound Semiconductors Ltd   (United Kingdom)

Author keywords

MEMS; Nanodiamond; Piezoelectrics; PZT

Indexed keywords

LEAD; PIEZOELECTRIC ACTUATORS; RESONANCE; ZIRCONIUM;

ACTUATION FORCES; CANTILEVER ACTUATORS; HIGH-SPEED APPLICATIONS; LEAD ZIRCONATE TITANATE; MEMS; NANO DIAMONDS; NANODIAMOND; PIEZOELECTRIC ACTUATION; PIEZOELECTRICS; PZT; RESONANCE FREQUENCIES; UNIMORPH;

DIAMONDS;

EID: 48849089338     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.119     Document Type: Article

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