Nanocrystalline diamond films for mechanical applications

Physica Status Solidi (A) Applied Research

Volumn 201, Issue 11, 2004, Pages 2553-2557

  Guillén, F J Hernández ^a   Janischowsky, K ^a   Ebert, W ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NITROGEN; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON; STRESS ANALYSIS; TEXTURES;

HIGHLY ORIENTED DIAMONDS (HOD); NANOCRYSTALLINE DIAMOND FILMS; STRESS FREE FILMS;

DIAMOND FILMS;

EID: 5444232985     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200405173     Document Type: Conference Paper

References (3)

1. K. Janischowky, W. Ebert, and E. Kohn, Diam. Relat. Mater. 12, 336 (2003).
2. J. Philip, P. Hess, T. Feygelson, J. E. Butler, S. Chattopadhyay, K. H. Chen, and L. C. Chen, J. Appl. Phys. 93, 2164 (2003).
3. H. D. Espinosa, B. Peng, B. C. Prorok, N. Moldovan, O. Auciello, J. A. Carlisle, D. M. Gruen, and D. C. Mancini, J. Appl. Phys. 94, 6076 (2003).