Patterning of diamond microstructures on Si substrate by bulk and surface micromachining

Journal of Materials Processing Technology

Volumn 132, Issue 1-3, 2003, Pages 73-81

  Fu, Yongqing ^a   Du, Hejun ^a   Miao, Jianmin ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diamond; MEMS; Microstructures; Reactive ion etching; Selective deposition

Indexed keywords

DIAMOND FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; MICROWAVES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SILICON;

DIAMOND MICROSTRUCTURES;

DIAMONDS;

EID: 0037427588     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(02)00266-2     Document Type: Article

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