Application of highly oriented, planar diamond (HOD) films of high mechanical strength in sensor technologies

Diamond and Related Materials

Volumn 7, Issue 6, 1998, Pages 779-782

  Gluche, P ^a   Adamschik, M ^a   Vescan, A ^a   Ebert, W ^a   Szucs F ^c   Fecht, H J ^a   Floter A ^b   Zachai, R ^b   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

^b DAIMLER AG   (Germany)

^c TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Force; Gauge factor; Piezoresistor; Young's modulus

Indexed keywords

BORON; CRYSTAL ORIENTATION; DOPING (ADDITIVES); ELASTIC MODULI; MICROSENSORS; PIEZOELECTRIC DEVICES; STRENGTH OF MATERIALS;

PIEZORESISTORS;

DIAMOND FILMS;

EID: 0032092608     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00303-8     Document Type: Article

References (8)

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