Diamond electro-mechanical micro devices - Technology and performance

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1684-1691

  Kohn, E ^a   Adamschik, M ^a   Schmid, P ^a   Ertl, S ^a   Floter A ^b  

^a UNIVERSITY OF ULM   (Germany)

^b GFD Gesellschaft für Diamantprodukte mbH   (Germany)

Author keywords

Chemical vapour deposition; Diamond; Electro mechanical micro devices

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; ELECTROCHEMISTRY; MICROELECTROMECHANICAL DEVICES;

ELECTROCHEMICAL MICRORELAY;

DIAMONDS;

DIAMOND;

EID: 0035449861     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00396-X     Document Type: Article

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12. Modeling approach for CVD-Diamond based mechanical structures
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