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Volumn 25, Issue 3, 2007, Pages 730-733
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Fabrication of suspended single crystal diamond devices by electrochemical etch
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCH PROFILE;
HOMOEPITAXIAL GROWTH;
MICRODISKS;
BORON;
DIAMONDS;
ELECTROCHEMICAL ETCHING;
EPITAXIAL GROWTH;
IONS;
MICROFABRICATION;
SINGLE CRYSTALS;
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EID: 34249869263
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2731327 Document Type: Article |
Times cited : (33)
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References (16)
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