SCOPUS 정보 검색 플랫폼

Volumn 25, Issue 3, 2007, Pages 730-733

Fabrication of suspended single crystal diamond devices by electrochemical etch

Author keywords

[No Author keywords available]

Indexed keywords

ETCH PROFILE; HOMOEPITAXIAL GROWTH; MICRODISKS;

BORON; DIAMONDS; ELECTROCHEMICAL ETCHING; EPITAXIAL GROWTH; IONS; MICROFABRICATION;

SINGLE CRYSTALS;

EID: 34249869263 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2731327 Document Type: Article

Times cited : (33)

References (16)

1
- 33645527561
- S. Strauf, et al., Phys. Rev. Lett. 96, 127404 (2006).
- (2006) Phys. Rev. Lett. , vol.96 , pp. 127404
- Strauf, S.¹

2
- 18844418460
- A. Badolato, K. Hennessy, M. Atature, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, Science 308, 1158 (2005).
- (2005) Science , vol.308 , pp. 1158
- Badolato, A.¹ Hennessy, K.² Atature, M.³ Dreiser, J.⁴ Hu, E.⁵ Petroff, P.M.⁶ Imamoglu, A.⁷

3
- 9244245742
- T. Yoshie, et al., Nature (London) 432, 200 (2004).
- (2004) Nature (London) , vol.432 , pp. 200
- Yoshie, T.¹

4
- 9144260766
- J. P. Reithmaier, et al., Nature (London) 432, 197 (2004).
- (2004) Nature (London) , vol.432 , pp. 197
- Reithmaier, J.P.¹

5
- 1642617165
- F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
- (2004) Phys. Rev. Lett. , vol.92 , pp. 076401
- Jelezko, F.¹ Gaebel, T.² Popa, I.³ Gruber, A.⁴ Wrachtrup, J.⁵

6
- 0001629129
- R. Brouri, A. Beveratos, J.-P. Poizat, and P. Grangier, Opt. Lett. 25, 1294 (2000).
- (2000) Opt. Lett. , vol.25 , pp. 1294
- Brouri, R.¹ Beveratos, A.² Poizat, J.-P.³ Grangier, P.⁴

7
- 9744236551
- C. F. Wang, A. Badolato, J. Urayama, I. Wilson-Rae, P. M. Petroff, A. Imamoglu, and E. Hu, Appl. Phys. Lett. 85, 3423 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 3423
- Wang, C.F.¹ Badolato, A.² Urayama, J.³ Wilson-Rae, I.⁴ Petroff, P.M.⁵ Imamoglu, A.⁶ Hu, E.⁷

8
- 0005251344
- M. Marchywka, P. E. Pehrsson, Jr., D. J. Vestyck, and D. Moses, Appl. Phys. Lett. 63, 3521 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3521
- Marchywka, M.¹ Pehrsson Jr. P., E.² Vestyck, D.J.³ Moses, D.⁴

9
- 34249905358
- M. Marchywka and P. E. Pehrsson, U.S. Patent No. 5,587,210 (28 June 1994).
- (1994)
- Marchywka, M.¹ Pehrsson, P.E.²

10
- 34249901703
- M. Marchywka and P. E. Pehrsson, U.S. Patent No. 5,891,575 (22 Feb 1996).
- (1996)
- Marchywka, M.¹ Pehrsson, P.E.²

11
- 0037340204
- J. E. Butler, M. W. Geis, K. E. Krohn, J. Lawless, Jr., S. Deneault, T. M. Lyszczarz, D. Flechtner, and R. Wright, Semicond. Sci. Technol. 18, S67 (2003).
- (2003) Semicond. Sci. Technol. , vol.18 , pp. 67
- Butler, J.E.¹ Geis, M.W.² Krohn, K.E.³ Lawless Jr., J.⁴ Deneault, S.⁵ Lyszczarz, T.M.⁶ Flechtner, D.⁷ Wright, R.⁸

12
- 20444417394
- J. Yang, W. Huang, T. P. Chow, and J. E. Butler, Mater. Res. Soc. Symp. Proc. 829, B7.2.1 (2005).
- (2005) Mater. Res. Soc. Symp. Proc. , vol.829 , pp. 721
- Yang, J.¹ Huang, W.² Chow, T.P.³ Butler, J.E.⁴

13
- 36449002292
- N. R. Parikh, et al., Appl. Phys. Lett. 61, 3124 (1992).
- (1992) Appl. Phys. Lett. , vol.61 , pp. 3124
- Parikh, N.R.¹

14
- 33847186599
- C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, Appl. Phys. Lett. 90, 081110 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 081110
- Wang, C.F.¹ Choi, Y.-S.² Lee, J.C.³ Hu, E.L.⁴ Yang, J.⁵ Butler, J.E.⁶

15
- 28344453801
- In-Kag Hwang, Sun-Kyung Kim, Jin-Kyu Yang, Se-Heon Kim, Sang Hoon Lee, and Yong-Hee Lee, Appl. Phys. Lett. 87, 131107 (2005).
- (2005) Appl. Phys. Lett. , vol.87 , pp. 131107
- In-Kag, H.¹ Sun-Kyung, K.² Jin-Kyu, Y.³ Se-Heon, K.⁴ Sang Hoon, L.⁵ Yong-Hee, L.⁶

16
- 29744458375
- J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. GAebel, I. Popa, F. Jelezko, and J. Wrachtrup, Appl. Phys. Lett. 87, 261909 (2005).
- (2005) Appl. Phys. Lett. , vol.87 , pp. 261909
- Meijer, J.¹ Burchard, B.² Domhan, M.³ Wittmann, C.⁴ Gaebel, T.⁵ Popa, I.⁶ Jelezko, F.⁷ Wrachtrup, J.⁸

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