Nanomechanical resonant structures in nanocrystalline diamond

Applied Physics Letters

Volumn 81, Issue 23, 2002, Pages 4455-4457

  Sekaric, L ^a   Parpia, J M ^a   Craighead, H G ^a   Feygelson, T ^b   Houston, B H ^c   Butler, J E ^c  

^a Department of Obstetrics Gynecology   (United States)

^b SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SINGLE CRYSTALS; THIN FILMS;

RESONANT STRUCTURES;

DIAMONDS;

EID: 0037011598     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1526941     Document Type: Article

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