Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process

Thin Solid Films

Volumn 340, Issue 1, 1999, Pages 1-6

  Ramesham, Rajeshuni ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; FILM GROWTH; FILM PREPARATION; HYDROGEN; METHANE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SURFACE TREATMENT;

HIGH PRESSURE MICROWAVE; SELECTIVE DEPOSITION; SURFACE MICROMACHINING PROCESS;

DIAMOND FILMS;

EID: 0032647563     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01370-4     Document Type: Article

References (18)

1. Ramesham R., Rose M.F., Askew R.F., Myres R. J. Mater. Sci. Lett. 15:1996;1551.
2. Girshick S.L., Li C., Yu B.W., Han H. Plasma Chem. Plasma Process. 13:1992;169.
3. M. Murakawa, T. Okada, S. Takeuchi, in: M. Yoshikawa, M. Murakawa, Y. Tzeng, W.A. Yarbrough (Eds.), 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MY, Tokyo, Japan, 1993, p. 497.
4. A. Hirata, T. Uchida, M. Yoshikawa, in: M. Yoshikawa, M. Murakawa, Y. Tzeng, W.A. Yarbrough (Eds.), 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MY, Tokyo, Japan, 1993, p. 469.
5. Wei J., Tzeng Y. Diamond Films Technol. 5:1995;79.
6. Kim J.W., Baik Y.J., Eun K.Y., Yoon D.N. Thin Solid Films. 212:1992;104.
7. Ramesham R., Roppel T., Ellis C., Jaworske D.A., Baugh W. J. Mater. Res. 6:1991;1278.
8. Davidson J.L., Ramesham R., Ellis C. J. Electrochem. Soc. 137:1990;3206.
9. Salvadori M.C., Cattani M., Mammana V, Monteiro O, Ager III J.W, Brown I.G. Thin Solid Films. 291:1996;157.
10. Noguchi H., Kashida M., Kubota Y., Takarada T. Proc. SPIE Int. Soc. Opt. Eng. 2793:1996;225-229.
11. Deng K., Ko W.H. Sensors and Actuators A (Physical). A35:(1):1992;45.
12. M.R. Houston, R.T. Howe, K. Komvopoulos, R. Maboudian, in: M.D. Drory, D.B. Bogy, M.S. Donley, J.E. Field (Eds.), Mechanical Behavior of Diamond and other Forms of Carbon Symposium, p. xi+474, 1995, pp. 391-402.
13. M. Aslam, D. Schulz, 8th Int. Conf. on Solid-State Sensors and Actuators and Eurosensors IX, Digest of Technical Papers, Vol. 2, 1995, p. 3.
14. Ramesham R., Ellis C.D., Olivas J.D., Bolin S. Thin Solid Films. 330:1998;62.
15. Ramesham R., Ellis C. J. Mater. Res. 7:1992;1195.
16. Davidson J.L., Ellis C., Ramesham R. J. Electron. Mater. 18:1989;711.
17. Ramesham R., Roppel T., Hajek B.F., Ellis C. J. Electrochem. Soc. 137:1990;3203.
18. J.E. Field, The Properties of Diamond, Academic Press, London, 1979.