"all-diamond-inkjet" for dispension of aggressive liquids

Device Research Conference - Conference Digest, DRC

Volumn 2005, Issue , 2005, Pages 229-230

  Muller R ^a   Berger, W ^a   Janischowsky, K ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; NOZZLES; PIEZOELECTRIC DEVICES; THERMAL STRESS; THERMOELECTRICITY;

PIEZOELECTRIC ACTUATORS; PLANAR CAPILLARIES; PLANAR MICROARRAYS; POLYMER CAPILLARY SYSTEM;

FLUIDIC DEVICES;

EID: 33751341814     PISSN: 15483770     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DRC.2005.1553133     Document Type: Conference Paper

References (8)

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2. Krause, P. et al. "A micromachined single-chip inkjet printhead", Sens.&Act. A: Phys., 1996, 53, 405-409
3. Lee, S. et al. "A monolithic inkjet print head: DomeJet", Sens.&Act. A: Phys., 2002, 95, 114-119
4. Baek, S.S. et al. "A novel back-shooting inkjet printhead using trench-filling and SOI wafer", Sens.&Act. A: Phys., 2004, 114, 392-397
5. Wang, Y. et al. "Maskless lithography using drop-on-demand InkJet printing method", Emerging Lithographic Technologies VIII; Proceedings of SPIE, 2004, 5374, 628-636
6. www.microdrop.com
7. Müller, R. et al. "An 'all-diamond' inkjet realized in sacrificial layer technology", Diamond Rel.Mat., 2005, In Press
8. Müller, R.; Schmid, P.; Munding, A.; Gronmaier, R. & Kohn, E. "Elements for surface microfluidics in diamond", Diamond Rel.Mat., 2004, 13, 780-784