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Volumn 203, Issue 12, 2006, Pages 3185-3190

Diamond - Application to piezoelectric bimorph cantilever sensors

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY SHIFT; HIGH PRESSURE SENSOR; PIEZOELECTRIC BIMORPH CANTILEVER SENSORS; SENSITIVE ACOUSTIC SENSORS;

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; DIAMONDS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS;

SENSORS;

EID: 33749350640 PISSN: 18626300 EISSN: 18626319 Source Type: Journal
DOI: 10.1002/pssa.200671109 Document Type: Conference Paper

Times cited : (13)

References (13)

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