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Diamond and Related Materials

Volumn 10, Issue 11, 2001, Pages 1952-1961

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

(14) Krauss, A R a,g Auciello, O a Gruen, D M a Jayatissa, A a Sumant, A a Tucek, J a Mancini, D C a Moldovan, N a Erdemir, A a Ersoy, D b Gardos, M N c Busmann, H G d Meyer, E M e Ding, M Q f

a ARGONNE NATIONAL LABORATORY (United States)

b University of Illinois (United States)

c Electronic Systems (United States)

d FRAUNHOFER INSTITUTE FOR MANUFACTURING TECHNOLOGY AND ADVANCED MATERIALS IFAM (Germany)

e UNIVERSITY OF BREMEN (Germany)

f INSTITUTE OF ELECTRONICS (China)

g UNIVERSITY OF CHICAGO (United States)

Author keywords

Assembly devices; Diamond thin films; Ultrananocrystalline

Indexed keywords

BENDING (DEFORMATION); FABRICATION; FRACTURE; GRAIN SIZE AND SHAPE; HYDROPHILICITY; SILICON; THIN FILMS; TRIBOLOGY; VAPOR DEPOSITION;

VIBRATION SENSORS;

DIAMONDS;

DIAMOND COATING; FABRICATION; MICROELECTROMECHANICAL SYSTEM; TRIBOLOGY;

EID: 0035499507 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00385-5 Document Type: Article

Times cited : (354)

References (50)

1
- 0001168907
- B. Bushan (Ed.), Kluwer Academic Publishers, The Netherlands
- (1998) Tribology Issues and Opportunities in MEMS , pp. 325
- Sniegowski, J.J.¹

2
- 0002675599
- (1992) Mater. Res. Soc. Symp. Proc , vol.276 , pp. 67
- Lee, A.P.¹ Pisano, A.P.² Lim, M.G.³

3
- 0025698150
- (1990) Sensors Actuators , vol.21-23 A , pp. 184
- Gabriel, K.J.¹ Behi, F.² Mahadevan, R.³ Mehregany, M.⁴

4
- 0002894871
- B. Bushan (Ed.), Kluwer Scientific Publishers, The Netherlands
- (1998) Tribology Issues and Opportunities in MEMS , pp. 341
- Gardos, M.N.¹

5
- 0000375672
- (1992) Appl. Phys. Lett , vol.60 , pp. 2992
- Tong, L.¹ Mehregany, M.² Matus, L.G.³

6
- 0002848732
- Kluwer Scientific Publishers, (in press)
- (2000) Challenges for Lubrication in High Speed MEMS, Nanotribology: Critical Assessment and Research Needs
- Breuer, K.¹

7
- 85018805597
- Elsevier, Leeds, England, 14-17 September (in press)
- (1999) Thinning Films and Tribological Interfaces, Proc 26 Leeds-Lyon Symposium on Tribology
- Gardos, M.N.¹

8
- 0001522433
- (1969) Mater. Res. Bull , vol.4 , pp. 365
- Neuberger, M.¹

9
- 0002068756
- B. Bushan (Ed.), Kluwer Academic Publishers, The Netherlands
- (1998) Tribology Issues and Opportunities in MEMS , pp. 95
- Spearing, S.M.¹ Chen, K.S.²

10
- 0001768936
- B. Bushan (Ed.), Kluwer Academic Publishers, The Netherlands
- (1998) Tribology Issues and Opportunities in MEMS , pp. 579
- Rymuza, Z.¹ Kusznierewicz, Z.² Misiak, M.³ Schmidt-Szalowski, K.⁴ Rzanek-Boroch, Z.⁵ Sentek, J.⁶

11
- 0033620332
- (1999) Surf. Coat. Technol , vol.113 , pp. 183
- Gardos, M.N.¹

12
- 85018823862
- Lyon, France, 5-8 September (in press)
- (1999) th Leeds-Lyon Symposium on Tribology
- Gardos, M.N.¹

13
- 0034499633
- (2000) MRS Proceedings ’Materials Science of Microelectromechanical Systems (MEMS) Devices II’ , vol.605 , pp. 73
- Auciello, O.¹ Krauss, A.R.² Gruen, D.M.³

14
- 0001325533
- (1996) Diamond Relat. Mater , vol.5 , pp. 747
- Vescan, A.¹ Ebert, W.² Borst, T.H.³ Kohn, E.⁴

15
- 0345906710
- (1981) J. Cryst. Growth , vol.52 , pp. 219
- Spitsyn, B.V.¹ Bouilov, L.L.² Derjaguin, B.V.³

16
- 0007041336
- (1993) J. Phys. Chem , vol.97 , pp. 23
- Harris, S.J.¹ Goodwin, D.G.²

17
- 0003459771
- National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council NMAB-445, National Academy Press
- (1990) Status and Applications of Diamond and Diamond-like Materials: An Emerging Technology , pp. 28

18
- 0001648666
- (1995) Diamond Relat. Mater , vol.4 , pp. 820
- Bachmann, P.K.¹ Hagemann, H.J.² Lade, H.³

19
- 0032622261
- (1999) Diamond Relat. Mater , vol.8 , pp. 934
- Kohn, E.¹ Gluche, P.² Adamschik, M.³

20
- 24644451474
- (1994) Appl. Phys. Lett , vol.64 , pp. 1502
- Gruen, D.M.¹ Liu, S.² Krauss, A.R.³ Luo, J.⁴ Pan, X.⁵

21
- 0000086339
- (1994) J. Appl. Phys , vol.75 , pp. 1758
- Gruen, D.M.¹ Liu, S.² Krauss, A.R.³ Pan, X.⁴

22
- 0030181257
- (1996) J. Phys. Chem , vol.100 , pp. 11654
- Redfern, P.C.¹ Homer, D.A.² Curtiss, L.A.³ Gruen, D.M.⁴

23
- 21844493878
- (1995) J. Vac. Sci. Technol , vol.13 A , pp. 1628
- Gruen, D.M.¹ Zuiker, C.D.² Krauss, A.R.³ Pan, X.⁴

24
- 0002828176
- Materials Research Society Fall
- (1999) Proc. Amorphous and Nanostructured Carbon Symposium , vol.593 , pp. 233
- Corrigan, T.D.¹ Krauss, A.R.² Gruen, D.M.³ Auciello, O.⁴ Chang, R.P.H.⁵

25
- 0001648827
- (1998) Appl. Phys. Lett , vol.73 , pp. 1646
- McCauley, T.G.¹ Gruen, D.M.² Krauss, A.R.³

26
- 0032058066
- (1998) Nanostruct. Mater , vol.10 , Issue.4 , pp. 649
- Qin, L.C.¹ Zhou, D.² Krauss, A.R.³ Gruen, D.M.⁴

27
- 85045814908
- (1987) Nature , vol.329 , pp. 589
- Nuth, J.A.¹

28
- 0030378566
- (1996) Mater. Res. Soc. Symp. Proc , vol.403 , pp. 291
- Csencsits, R.¹ Gruen, D.M.² Krauss, A.R.³ Zuiker, C.⁴

29
- 0000987744
- (1998) J. Appl. Phys , vol.83 , pp. 540
- Zhou, D.¹ McCauley, T.G.² Qin, L.C.³ Krauss, A.R.⁴ Gruen, D.M.⁵

30
- 0030415214
- (1996) Mater. Res. Soc. Proc , vol.437 , pp. 211
- Zuiker, C.D.¹ Krauss, A.R.² Gruen, D.M.³

31
- 0032142593
- (1998) J. Mater. Res , vol.13 , pp. 2077
- Keblinski, P.¹ Wolf, D.² Phillpot, S.R.³ Gleiter, H.⁴

32
- 0032167050
- (1998) MRS Bull , vol.23 , pp. 36
- Keblinski, P.¹ Wolf, D.² Cleri, F.³ Phillpot, S.R.⁴ Gleiter, H.⁵

33
- 0032647563
- (1999) Thin Solid Films , vol.340 , pp. 1
- Rameshan, R.¹

34
- 0001567218
- (1997) Diamond Relat. Mater , vol.6 , Issue.5-7 , pp. 906
- Kulisch, W.¹ Malave, A.² Scholz, W.³ Mihalcea, C.⁴ Oesterschulze, E.⁵ Lippold, G.⁶

35
- 0000075431
- (1997) Appl. Phys. Lett , vol.71 , pp. 3820
- Friedmann, T.A.¹ Sullivan, J.P.² Knapp, J.A.³

36
- 3142533185
- (1996) Diamond Films Technol , vol.6 , pp. 31
- Erdemir, A.¹ Bindal, C.² Fenske, G.R.³

37
- 14944371716
- (1999) Surf. Coat. Technol , vol.121 , pp. 565
- Erdemir, A.¹ Fenske, G.R.² Krauss, A.R.³ Gruen, D.M.⁴ McCauley, T.⁵ Csencsits, R.T.⁶

38
- 0030450441
- (1996) Diamond Relat. Mater , vol.5 , pp. 923
- Erdemir, A.¹ Bindal, C.² Fenske, G.R.³ Zuiker, C.⁴ Krauss, A.R.⁵ Gruen, D.M.⁶

39
- 0025502871
- (1990) J. Electrochem. Soc , vol.137 , pp. 3206
- Davidson, J.L.¹ Ramesham, R.² Ellis, C.³

40
- 0028539088
- (1994) Sensors Actuators , vol.45 A , pp. 131
- Aslam, M.¹ Yang, G.S.² Masood, A.³

41
- 0029269774
- (1994) J. Micromech. Syst , vol.4 , pp. 34
- Wur, D.R.¹ Davidson, J.L.² Kang, W.P.³ Kinser, D.L.⁴

42
- 0001046662
- (1993) Diamond Relat. Mater , vol.2 , pp. 1096
- Dorsch, O.¹ Holzner, K.² Werner, M.³

43
- 0004703077
- (1993) J. Appl. Phys , vol.73 , pp. 1832
- Zaho, G.¹ Charlson, E.M.² Charlson, E.J.³

44
- 0029290116
- (1995) Sensor Actuators B: Chem , vol.25 , pp. 343
- Moller, S.¹ Obermeir, E.² Lin, J.³

45
- 0029777993
- (1996) Mater. Res. Soc. Symp. Proc , vol.416 , pp. 397
- Davidson, J.L.¹ Wang, W.P.²

46
- 0030150771
- (1996) IEEE Electron. Dev. Lett , vol.17 , pp. 250
- Yang, G.S.¹ Aslam, D.M.²

47
- 0027694903
- (1993) Mater. Lett , vol.18 , pp. 61
- Givargizov, E.I.¹ Zhirnov, V.V.² Kuznetsov, A.V.³ Plekhanov, P.S.⁴

48
- 0032340187
- (1998) Isr. J. Chem , vol.38 , pp. 135
- Rotter, S.¹

49
- 84994881510
- (1995) J. Appl. Phys , vol.77 , pp. 941
- Chen, C.F.¹ Chen, S.H.² Hong, T.M.³ Tsai, M.H.⁴

50
- 0031552790
- (1997) Appl. Phys. Lett , vol.71 , pp. 716
- Irwin, M.D.¹ Pantano, C.G.² Gluche, P.³ Kohn, E.⁴

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