SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 2-3, 2006, Pages 398-403

Polycrystalline diamond MEMS resonator technology for sensor applications

Author keywords

Diamond; MEMS resonator; Quality factor; Resonant frequency

Indexed keywords

ELECTROSTATICS; PIEZOELECTRICITY; RESONATORS;

CANTILEVER BEAM RESONATORS; MEMS RESONATOR; QUALITY FACTOR; RESONANT FREQUENCY;

MICROELECTROMECHANICAL DEVICES;

EID: 33644914478 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.08.032 Document Type: Article

Times cited : (56)

References (11)

1
- 1642293269
- K.L. Ekinci, Y.T. Yang, and M.L. Roukes Appl. Phys. Lett. 95 5 2004 2682
- (2004) Appl. Phys. Lett. , vol.95 , Issue.5 , pp. 2682
- Ekinci, K.L.¹ Yang, Y.T.² Roukes, M.L.³

2
- 0036903107
- J. Yang, T. Ono, and M. Esashi IEEE J. Microelectromech. Syst. 11 6 2002 (Dec.) 775
- (2002) IEEE J. Microelectromech. Syst. , vol.11 , Issue.6 , pp. 775
- Yang, J.¹ Ono, T.² Esashi, M.³

3
- 0033892144
- K.Y. Yasumura, T.D. Stowe, E.M. Chow, T. Pfafman, T.W. Kenny, B.C. Stipe, and D. Rugar J. Microelectromech. Syst. 9 1 2000 (Mar.) 117
- (2000) J. Microelectromech. Syst. , vol.9 , Issue.1 , pp. 117
- Yasumura, K.Y.¹ Stowe, T.D.² Chow, E.M.³ Pfafman, T.⁴ Kenny, T.W.⁵ Stipe, B.C.⁶ Rugar, D.⁷

4
- 2542499209
- N. Sepulveda, and D.M. Aslam J. Microelectron. Eng. 73-74 2004 435
- (2004) J. Microelectron. Eng. , vol.73-74 , pp. 435
- Sepulveda, N.¹ Aslam, D.M.²

5
- 19944431867
- D. Czaplewski, J.P. Sullivan, T.A. Friedmann, D.W. Carr, B.E.N. Keeler, and J.R. Wendt J. Appl. Phys. 97 2005 023517
- (2005) J. Appl. Phys. , vol.97 , pp. 023517
- Czaplewski, D.¹ Sullivan, J.P.² Friedmann, T.A.³ Carr, D.W.⁴ Keeler, B.E.N.⁵ Wendt, J.R.⁶

6
- 1542337024
- A.B. Hutchinson, P.A. Truitt, K.C. Schwab, L. Sekaric, J.M. Parpia, H.G. Craighead, and J.E. Butler Appl. Phys. Lett. 84 6 2004 972
- (2004) Appl. Phys. Lett. , vol.84 , Issue.6 , pp. 972
- Hutchinson, A.B.¹ Truitt, P.A.² Schwab, K.C.³ Sekaric, L.⁴ Parpia, J.M.⁵ Craighead, H.G.⁶ Butler, J.E.⁷

7
- 1542302995
- J.R. Clark, W.-T. Hsu, and C.T.-C. Nguyen IEEE Conf. on Solid-State Sensors and Actuators (Transducers '01) 2001 1118
- (2001) IEEE Conf. on Solid-State Sensors and Actuators (Transducers '01) , pp. 1118
- Clark, J.R.¹ Hsu, W.-T.² Nguyen, C.T.-C.³

8
- 0002614116
- F.R. Blom, S. Bouwstra, M. Elwenspoek, and J.H.J. Fruitman J. Vac. Sci. Technol. B10 1992 19
- (1992) J. Vac. Sci. Technol. , vol.10 , pp. 19
- Blom, F.R.¹ Bouwstra, S.² Elwenspoek, M.³ Fruitman, J.H.J.⁴

9
- 3042742341
- J. Wang, J.E. Butler, T. Feygelson, and C.T.-C. Nguyen 17th IEEE Intern. Conf on MEMS 2004 641
- (2004) 17th IEEE Intern. Conf on MEMS , pp. 641
- Wang, J.¹ Butler, J.E.² Feygelson, T.³ Nguyen, C.T.-C.⁴

10
- 22444442625
- J. Wang, J.E. Butler, D.S.Y. Hsu, and C.T.-C. Nguyen Solid-State Sensor, Actuator and Microsystems Workshop 2002 (Bune) 61
- (2002) Solid-State Sensor, Actuator and Microsystems Workshop , pp. 61
- Wang, J.¹ Butler, J.E.² Hsu, D.S.Y.³ Nguyen, C.T.-C.⁴

11
- 0037011598
- L. Sekarik, J.M. Parpia, H.G. Craighead, T. Feygelson, B.H. Houston, and J.E. Butler J. Appl. Phys. 81 23 2002 4455
- (2002) J. Appl. Phys. , vol.81 , Issue.23 , pp. 4455
- Sekarik, L.¹ Parpia, J.M.² Craighead, H.G.³ Feygelson, T.⁴ Houston, B.H.⁵ Butler, J.E.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.