Are diamonds a MEMS' best friend?

IEEE Microwave Magazine

Volumn 8, Issue 6, 2007, Pages 61-75

  Auciello, Orlando ^a   Pacheco, Sergio ^b   Sumant, Anirudha V ^a   Gudeman, Chris ^c   Sampath, Suresh ^c   Datta, Arindom ^c   Carpick, Robert W ^d   Adiga, Vivekananda P ^d   Zurcher, Peter ^b   Ma, Zhenqiang ^e   Yuan, Hao Chih ^e   Carlisle, John A ^f   Kabius, Bernd ^a   Hiller, Jon ^a   Srinivasan, Sudarsan ^a,g  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b FREESCALE SEMICONDUCTOR INC   (United States)

^c Innovative Micro Technology   (United States)

^d UNIVERSITY OF PENNSYLVANIA   (United States)

^e UNIVERSITY OF WISCONSIN MADISON   (United States)

^f Advanced Diamond Technologies

^g INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS BATCH FABRICATION; SURFACE-MACHINING TECHNOLOGY; THIN-FILM DEPOSITION METHODS; UNIFORM THICKNESS;

DIAMOND FILMS; ELECTRIC SWITCHES; MECHANICAL PROPERTIES; NEMS; SURFACE MICROMACHINING; THICKNESS MEASUREMENT;

MEMS;

EID: 37349090686     PISSN: 15273342     EISSN: None     Source Type: Trade Journal    
DOI: 10.1109/MMM.2007.907816     Document Type: Article

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