Piezoelectric micromechanical disk resonators towards UHF band

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2004, Pages 926-929

  Yan, Le ^a   Wu, Jian ^b   Tang, William C ^a,b  

^a University of California at Irvine   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

MEMS; Piezoelectric; Resonator; UHF

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTIMIZATION; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SILICON ON INSULATOR TECHNOLOGY; THERMAL EFFECTS; VACUUM;

MEMS; PIEZOELECTRICS; UHF; VACUUM TESTING;

RESONATORS;

EID: 21644484862     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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