Diamond switch using new thermal actuation principle

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 418-421

  Schmid, P ^a   Hernandez Guillen, F J ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Actuators; Device modeling; Diamond film; Thermal properties

Indexed keywords

CRYSTAL MICROSTRUCTURE; FABRICATION; SWITCHES;

THERMAL ACTUATION;

DIAMONDS;

DIAMOND;

EID: 0038577123     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00399-0     Document Type: Article

References (4)

1. M. Adamschik, et al., Electrostatic Diamond Micro Switch, Tenth International Conference on Solid-State Sensors and Actuators, Transducers '99, Sendai, Japan, 1999, Digest of Technical Papers, vol. 2, p. 1284
2. Adamschik, M. (2002). Diamond microwave micro relay. Diamond Relat. Mater., 11 672-676.
3. P. Gluche, et al., Novel thermal microactuator based on CVD-diamond films, IEDM, 1998
4. A. Kaiser, et al., Diamond based injection system for spotting and synthesis in biochemistry, AIChE Annual Meeting, 2002, submitted for publication