Nanocrystalline diamond resonator array for RF signal processing

Diamond and Related Materials

Volumn 15, Issue 11-12 SPEC. ISS., 2006, Pages 2061-2067

  Baldwin, Jeffrey W ^a   Zalalutdinov, Maxim K ^b   Feygelson, Tatyana ^c   Pate, Bradford B ^a   Butler, James E ^a   Houston, Brian H ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

^c SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

Arrays; Diamond; Nanomechanical; Resonator

Indexed keywords

DIAMOND FILMS; DIAMONDS; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESONATORS; SIGNAL PROCESSING;

COUPLED RESONATORS; NANOMECHANICAL; RESONATOR ARRAYS;

ARRAYS;

EID: 33751160824     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.09.009     Document Type: Article

References (24)

1. Baldwin J.W., Zalalutdinov M., Feygelson T., Butler J.E., and Houston B.H. J. Vac. Sci. Technol., B 24 (2005) 50
2. Baldwin J.W., Zalalutdinov M., Butler J.E., Feygelson T., and Houston B.H. Proc. SPIE Int. Soc. Opt. Eng. 6002 (2005) 600213
3. Carr D.W., Sekaric L., and Craighead H.G. J. Vac. Sci. Technol., B 16 (1998) 3821
4. Takano Y., Nagao M., Sakaguchi I., Tachiki M., Hatano T., Kobayashi K., Umezawa H., and Kawarada H. Appl. Phys. Lett. 85 (2004) 2851
5. Knickerbocker T., Strother T., Schwartz M.P., Russell Jr. J.N., Butler J.E., Smith L.M., and Hamers R.J. Langmuir 19 (2003) 1938
6. Larsson K., Björkman H., and Hjort K. J. Appl. Phys. 90 (2001) 1026
7. Bandis C., and Pate B.B. Surf. Sci. 350 (1996) 315
8. Metcalf T.H., Liu X., Houston B.H., Baldwin J.W., and Butler J.E. Appl. Phys. Lett. 86 (2005) 081910
9. Liu X., Vignola J.F., Simpson H.J., Lemon B.R., Houston B.H., and Photiadis D.M. J. Appl. Phys. 97 (2005) 023524
10. Wong A.-C., and Nguyen C.T.-C. J. Microelectromech. Syst. 13 (2004) 100
11. Reichenbach R.B., Zalalutdinov M., Aubin K.L., Rand R., and Houston B.H. J. Microelectromech. Syst. 14 (2005) 1244
12. Wang J., Butler J.E., Feygelson T., and Nguyen C.T.-C. Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf (2004) 641
13. Zalalutdinov M.K., Baldwin J.W., Marcus M.H., Reichenbach R.B., Parpia J.M., and Houston B.H. Appl. Phys. Lett. 88 (2006) 143504
14. Hodges C.H. J. Sound Vib. 82 (1982) 411
15. Judge J.A., Houston B.H., Photiadis D.M., and Herdic P.C. J. Sound Vib. 290 (2006) 1119
16. Philip J., Hess P., Feygelson T., Butler J.E., Chattopadhyay S., Chen K.H., and Chen L.C. J. Appl. Phys. 93 (2003) 2164
17. Namatsu H., Takahashi Y., Yamazaki K., Yamaguchi T., Nagase M., and Kurihara K. J. Vac. Sci. Technol., B 16 (1998) 69
18. van Delft F.C.M.J.M., Weterings J.P., van Langen-Suurling A.K., and Romijn H.J. J. Vac. Sci. Technol., B 18 (2000) 3419
19. Anguita J., and Briones F. Sens. Actuators, A, Phys. 64 (1998) 247
20. M.K. Zalalutdinov, J.W. Baldwin, M.H. Marcus, R.B. Reichenbach, J.M. Parpia, B.H. Houston, Tech. Digest, 2006 Solid-State Sensor and Actuator Workshop, Hilton Head, SC.
21. Vignola J.F., Judge J.A., Jarzynski J., Zalalutdinov M., Houston B.H., and Baldwin J.W. Appl. Phys. Lett. 88 (2006) 041921
22. Buks E., and Roukes M. J. Microelectromech. Sys. 11 (2002) 802
23. Lifshitz R., and Cross M.C. Phys. Rev., B 67 (2003) 134302
24. Castanier M.P., and Pierre C. J. Sound Vib. 168 (1993) 479