Growth of diamond films with high surface smoothness

Diamond and Related Materials

Volumn 15, Issue 1, 2006, Pages 22-28

  Huang, Shr Ming ^a   Hsu, Hsiao Chiu ^a   You, Min Sheng ^a   Hong, Franklin Chau Nan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Backside; Diamond; Hot filament chemical vapor deposition (HFCVD); Positive bias; Smooth surface

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; GROWTH KINETICS; SILICON; SUBSTRATES; SURFACE PHENOMENA;

BACKSIDE; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD); POSITIVE BIAS; SMOOTH SURFACES;

DIAMOND FILMS;

EID: 29144512448     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.06.031     Document Type: Article

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