Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films

Journal of Physics Condensed Matter

Volumn 16, Issue 16, 2004, Pages

  Auciello, Orlando ^a   Birrell, James ^a   Carlisle, John A ^a   Gerbi, Jennifer E ^a   Xiao, Xingcheng ^a   Peng, Bei ^b   Espinosa, Horacio D ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; CHEMICAL VAPOR DEPOSITION; CONFORMATIONS; DIAMOND FILMS; MACHINING; MATERIALS SCIENCE; STRENGTH OF MATERIALS; SURFACE PHENOMENA; THERMODYNAMIC STABILITY; THIN FILMS; TRIBOLOGY;

BIODEVICES; DIAMOND THIN FILMS; INTERGRANULAR ADHESION; ULTRANANOCRYSTALLINE DIAMOND (UNCD);

MICROELECTROMECHANICAL DEVICES;

EID: 2442437670     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/16/16/R02     Document Type: Review

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